Residual gas analyzer, or RGA, is a common process monitor in vacuum process. It is a special type of mini-scale mass spectrometer that allows us to know the partial pressures of the gases in the vacuum chamber. For example, one common usage of RGA is helium leak detection: pouring helium gas on to the wall …
This article is transferred from my post on kechuang.org, so all images have marks at the corner. Vacuum Chamber & Mass Spectrometer Unlike a typical LCMS or GCMS, Omnistar can work independently, without connecting to liquid or gas chromatography equipments and their heaters to vaporize samples (this MS only analyzes gaseous substances). Omnistar uses a …
Read more “Pfeiffer Omnistar mass spectrometer(MS)’s vacuum chamber & sampling port”
This is an old and simple RGA from Inficon for helium leak detection. For more information, please have a look at the article “Residual Gas Analyzer” in the same category.